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[Semiconductor Industry Case Study] Adhesion Fixture Resist Liquid Adhesion Prevention 'Nano Process'

A circuit board that challenges "thinness." Achieving both strict quality maintenance and production efficiency! We will introduce examples of coating to prevent resist liquid adhesion to suction transport jigs.

Here is an example of surface treatment for device components that apply resist liquid to precision substrates. ■Consultation In the process of applying resist liquid to a film-like thin substrate, there was a consultation regarding the resist liquid adhering to the suction fixture during the application process to the precision substrate. ■Concern In the process of applying resist liquid to a film-like thin substrate, a problem arose where the resist liquid adhered to the suction fixture, causing the resist liquid from the fixture to stick to the substrate being transported next. The adhesion of resist liquid to the substrate leads to product defects, necessitating an increase in the cleaning frequency of the transport fixture, which in turn hindered productivity. ■Request To solve the problem, we initially tried prototyping with Teflon™ coating, but the slight surface irregularities of the coating transferred as patterns onto the thin substrate, resulting in product defects. A surface treatment that balances precision and prevents the adhesion of resist liquid was necessary for problem resolution. 【Issues to be resolved】 - Adhesion of resist liquid - Cleaning time - Variability in coating thickness ■Adopted Coating 'NanoProcess® TC-10' *For detailed solutions, please download the PDF or contact us.

• Company：吉田ＳＫＴ
• Price：Other

• Surface treatment contract service